Abstract: Servitization is an important way to promote the transformation and upgrading of China′s equipment manufacturing industry, and its operation is greatly influenced by the government′s science and technology policy. Based on the analysis of the mechanism of the servitization effect of science and technology policies on China′s equipment manufacturing industry, combined with the panel data of Statistical Yearbook in equipment manufacturing industry from 2011 to 2018, this paper uses DEA-Tobit method to measure the efficiency of science and technology policy in China′s equipment manufacturing industry servitization, and makes an empirical analysis of the influence factors of the servitization science and technology policy efficiency. The results show that: according to the overall, the pure technical efficiency of servitization science and technology policy in China′s equipment manufacturing industry is effective, but the comprehensive efficiency in some years is ineffective;by industry, there is industry heterogeneity in servitization science and technology policy efficiency. The level of senior management and market size have a significantly positive impact on the efficiency of servitization science and technology policy in the equipment manufacturing industry, the government R&D spending strength and service economy level exists significantly negative effects, and technology dissemination and diffusion capacity has no significant influence on the efficiency of the science and technology policy.